http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011148253-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ff91fead4e427a088b840b1992b9d1bc |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41C1-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G1-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41N1-24 |
| filingDate | 2010-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c902ba6056e1f392f570ed9e6f39fc7b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9749c62f2e9ac10372b50f1fc0325c66 |
| publicationDate | 2011-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011148253-A |
| titleOfInvention | Metal mask by laser processing and chemical polishing method thereof |
| abstract | Compared to electrolytic polishing, a metal mask chemical polishing method is obtained by laser processing, which has a complex shape and minute parts, and has a uniform polishing amount with no uneven polishing amount due to the size of the opening. A stainless thin plate 2 is irradiated with a laser beam to form a plurality of openings 3, molten oxide 4 is adhered to the inner surface of the opening and the edge of the opening, and an oxide film is formed on the surface around the opening. The metal mask 1 obtained by laser processing and the metal mask obtained by laser processing are chemically polished, so that the molten oxide adhering to the inner surface of the opening and the edge of the opening, and the surface around the opening A chemical polishing treatment step for chemically polishing the oxide film formed, and the chemical polishing treatment step is excessively dissolved at the opening edge when the molten oxide (burr) adhering to the opening edge is removed. The burr is removed while keeping the edge of the opening at a substantially right angle without rounding. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017239755-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019107858-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018053345-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021059029-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10744600-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160005795-A |
| priorityDate | 2010-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.