http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011144377-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dbdfa36b677f4ef61245ca725011e221 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate | 2011-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a826779aace6a701898f5616fdf6e027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d33af65a3bb9e4c6e61663de114ade03 |
| publicationDate | 2011-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011144377-A |
| titleOfInvention | Etching solution for copper oxide and etching method for copper oxide using the same |
| abstract | The present invention provides an etching solution for copper oxide that can selectively dissolve only one of them in a state where copper oxides having different degrees of oxidation coexist, and an etching method for copper oxide using the same. An etching solution for copper oxide of the present invention includes at least a chelating agent, an oxidizing agent, and a surfactant, and the chelating agent includes α, ω-diamine acetic acid, α, ω-diamine succinic acid, α, At least one selected from the group consisting of ω-diaminepropionic acid, 1,2-diaminopropanetetraacetic acid, citric acid, isocitric acid, fumaric acid, adipic acid, succinic acid, glutamic acid, malic acid, tartaric acid, and salts thereof It is characterized by including. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9139771-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5710585-B2 |
| priorityDate | 2009-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 193.