http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011143677-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d93502a23a72b56472bc75854cfe7c60 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29K105-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29L7-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C41-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J9-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C41-36 |
| filingDate | 2010-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b13df0c5b78d406026a6d4d46bc16f6f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f24133adb37d7dbd81ca9e3af38b4f76 |
| publicationDate | 2011-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011143677-A |
| titleOfInvention | Film manufacturing apparatus and manufacturing method |
| abstract | PROBLEM TO BE SOLVED: To provide a film manufacturing apparatus and a manufacturing method capable of improving the yield of products by manufacturing a film having a uniform property over a wider area. A substrate holding table for holding a substrate on which a solution film is formed, a chamber, a nozzle device having an outlet for blowing humidified gas onto the surface of the solution film, and a solution in a direction opposite to the gas blowing direction. A casing having means for moving the nozzle device in a direction parallel to the surface of the membrane and means for controlling the temperature of the substrate, wherein the nozzle device has an inlet for introducing gas, and an inlet and an outlet And the inside of the casing are alternately displaced in different directions along the gas blowing direction, and one of the first ends along the gas blowing direction becomes a fixed end fixed to the inner wall surface of the casing. The second end opposite to the first end has a plurality of rectifying plates that are free ends that form a flow passage gap between the second end and the inner wall surface of the casing. [Selection] Figure 3 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101767632-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014065229-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015531410-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-202011005251-U1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103866098-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016099064-A1 |
| priorityDate | 2010-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 42.