http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011137890-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 |
| filingDate | 2009-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9bd142784285954564fbd5330cba6d4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d8eb0423c882e0be7f0ca48a9635f1a4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa6d3c775b97999fb3cf0f69fdabc984 |
| publicationDate | 2011-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011137890-A |
| titleOfInvention | Method and apparatus for producing developer for photolithography |
| abstract | A developer for photolithography capable of suppressing precipitation of TBAH when a developer having a desired TBAH concentration is produced by diluting a concentrated developer containing tetrabutylammonium hydroxide (TBAH) with pure water. And a manufacturing apparatus used in such a manufacturing method. A production method of the present invention comprises mixing a first concentration of tetrabutylammonium hydroxide aqueous solution and pure water in a mixing section 2 so as to have a second concentration diluted from the first concentration. An aqueous solution containing tetrabutylammonium hydroxide is obtained, and the temperature of the first concentration tetrabutylammonium hydroxide aqueous solution and pure water supplied to the mixing unit 2 is 27 ° C. or higher, and the mixing unit 2 The temperature of the liquid to be mixed is maintained at 27 ° C. or higher. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112313582-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113198373-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112272799-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014077936-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101447485-B1 |
| priorityDate | 2009-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 77.