http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011137683-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_86df70be6baafcc380c5c26c307c005b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-12 |
| filingDate | 2009-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8cbe362fb60aebecd7dfb8233efa6fcf |
| publicationDate | 2011-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011137683-A |
| titleOfInvention | Acceleration sensor manufacturing method, single-axis acceleration sensor |
| abstract | An object of the present invention is to improve the accuracy of the formation position of a piezoresistive element and improve the yield of an acceleration sensor. A piezoresistive portion is formed by introducing an impurity into a surface layer of a substrate made of single crystal silicon, and is adjacent to a third end and a fourth end of a prototype region of a flexible portion F among non-prototype regions. In a side wall forming region having a certain distance from each of the third end and the fourth end, a side wall 14a having etching selectivity with respect to the substrate is formed on the surface of the substrate, and the original region of the flexible portion F and The substrate S is anisotropically etched using the protection region for protecting the prototype region of the weight portion M and the prototype region of the frame portion S, and the side wall 14a as a mask, whereby the frame portion S, the weight portion M, and the flexible portion. F and piezoresistive elements P1, P2, P3, and P4 are formed from the piezoresistive portion. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-2580910-C1 |
| priorityDate | 2009-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 16.