http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011137163-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cebc9740ef706cde29e885504f274ffa |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C255-31 |
| filingDate | 2011-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fec26edb11760d28821b91da9c0ba128 |
| publicationDate | 2011-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011137163-A |
| titleOfInvention | (Meth) acrylic acid ester and its starting compound |
| abstract | A resin material for a resist composition having excellent sensitivity, resolution, dry etching resistance, and line edge roughness is provided. (Meth) acrylic acid esters and polymers made from β-cyanohydrin analogs as raw materials. (R1 shows a C1-C6 alkyl group which has a C4-C16 cyclic hydrocarbon group which may have an alkyl group, and R2 shows a C1-C6 alkyl group. Alternatively, R1 and R2 form a cyclic hydrocarbon group having 4 to 16 carbon atoms which may have an alkyl group together with the carbon atoms to which the alkyl group and the cyclic hydrocarbon group are bonded. Alkyl group optionally substituted with a hydroxy group, a carboxy group, an alkoxy group having 1 to 6 carbon atoms, an acyl group having 1 to 6 carbon atoms, or a carboxy group esterified with an alcohol having 1 to 6 carbon atoms. May be linear or branched.) [Selection figure] None |
| priorityDate | 2003-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 141.