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filingDate 2011-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2011-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2011136904-A
titleOfInvention Equipment suitable for contact with hot gases
abstract An apparatus suitable for contact with hot gases such as hydrogen and tetrachlorosilane is provided. [Solution] The reactor 100 can be used for hydrogenation of tetrachlorosilane. The reactor 100 has at least one part prepared from a silicon carbide based constituent material. The reactor 100 includes a pressurizable shell 101, a heat insulating material 102 surrounded by the pressurizable shell 101, a heating element 106 surrounded by the heat insulating material 102, and a reaction chamber 107 surrounded by the heating element 106. Including. [Selection] Figure 1
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