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publicationDate 2011-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2011119249-A
titleOfInvention Switch structure
abstract A switch device for a micro-electromechanical system (MEMS) structure is provided. The switch structure may include conductive elements 104 each including a respective arrangement on a substrate 108. The conductive element 104 can be substantially composed of a metallic material, the first position where the conductive element 104 is separated from the contact 102 at some separation interval, and the conductive element 104 contacts the contact 102 and the machine. It can be configured to be deformable between the second position for storing the dynamic energy. The conductive element 104 is further deformed to the second position at a cumulative time of at least 10 7 seconds at a temperature from about room temperature to about half the melting temperature of the metallic material, and then the separation interval in the absence of external force is cumulative time. Can be configured to vary by less than 20 percent. [Selection] Figure 1
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