| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b9a255559e1d94f20510a17a673b1078 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-132
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8246
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-331 |
| filingDate |
2009-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24f03e05e907954103c84b173e5f2164 |
| publicationDate |
2011-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2011114088-A |
| titleOfInvention |
Thin film manufacturing method and thin film element |
| abstract |
A thin film manufacturing method capable of manufacturing a thin film of stable quality at a low cost is provided. A method of manufacturing a thin film, comprising: a disposing step of disposing a substrate 20 in a thin film raw material solution formed on the substrate 20; and irradiating the first main surface 20a of the substrate 20 with light. Forming a thin film on one main surface 20a. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013157509-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013135163-A |
| priorityDate |
2009-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |