http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011109030-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-026 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-122 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-13 |
| filingDate | 2009-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23f54dd4426b0dbfdae73b1c04e2601b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_960c815b259360502dd9cf342c8ff504 |
| publicationDate | 2011-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011109030-A |
| titleOfInvention | Manufacturing method of optical semiconductor integrated device |
| abstract | An optical semiconductor integrated device in which an optical waveguide portion having an oblique optical waveguide and a device portion including a semiconductor layer containing Al and As are butt-jointed is manufactured. A step of growing a first semiconductor multilayer structure for forming an oblique optical waveguide 54 above a semiconductor substrate, a step of forming a butt joint growth mask 13 on the first semiconductor multilayer structure, and a mask 13 An optical semiconductor integrated circuit including a step of removing the first semiconductor multilayer structure using the etching mask as a mask and a butt joint growth of the second semiconductor multilayer structure including the second semiconductor layer containing Al and As using the mask 13 In the element manufacturing method, the mask 13 is joined along a region in which a plurality of rectangular portions 13 </ b> A to 13 </ b> G defined only by straight lines parallel to and perpendicular to the light propagation direction are formed as the oblique optical waveguide 54. It shall have a planar shape. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013149746-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016171135-A |
| priorityDate | 2009-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449160084 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23665650 |
Total number of triples: 17.