http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011101062-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12 |
| filingDate | 2011-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbf3615ba5f0eb07d4b30c10c7b7a26a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4b9b6b41d14e456990a425a42d30b7c |
| publicationDate | 2011-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011101062-A |
| titleOfInvention | Method for manufacturing thin film semiconductor device |
| abstract | PROBLEM TO BE SOLVED: To provide a thin film semiconductor device with few steps and less influence on a device forming layer at the time of separation. [Solution] A step of forming a separation layer comprising a porous layer on the semiconductor substrate by anodizing the semiconductor substrate; a step of forming a semiconductor film on the separation layer; Alternatively, a step of forming a semiconductor integrated circuit, and a notch groove formed in the semiconductor film from the surface side of the semiconductor film, the leading end of the notch groove being formed between the semiconductor substrate, the inside of the separation layer, or the semiconductor film and the separation layer. A part of the region of the semiconductor element and / or semiconductor integrated circuit in the separation layer by applying heat, vibration, or external force to the separation layer after the step of forming to be located at the interface and the groove formation step Separating from the member. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015115538-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015087904-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018037689-A |
| priorityDate | 2011-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.