| abstract |
A single crystal substrate having straight or spiral deep holes is provided at low cost. A single crystal substrate is composed of silicon as a main component, and holes are formed in a <100> direction, silver particles and / or palladium particles are present at the bottom of the holes, and the hole diameter / particle diameter is The ratio is 1 or more and 2 or less. The single crystal substrate 1 is a single crystal substrate whose main component is silicon, and has a spiral hole having a hole diameter of 10 to 200 nm and a spiral diameter of 100 to 600 nm, and silver, platinum at the bottom of the hole. And fine particles of one or more metals selected from palladium and palladium. [Selection] Figure 1 |