| abstract |
A liquid ejecting head, a liquid ejecting apparatus, and a piezoelectric element having good piezoelectric characteristics are provided. A pressure generating chamber communicated with a nozzle opening, a first electrode, a piezoelectric layer formed on the first electrode, and a second electrode formed on the piezoelectric layer. The first electrode is preferentially oriented to the (111) plane in the direction parallel to the film plane, and the (111) plane in the direction perpendicular to the film plane, (200) A liquid jet head in which the sum of the (111) plane and the (200) plane with respect to the total of the plane and the (220) plane is 20% or less is present. [Selection] Figure 2 |