| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c1150d676d88a827f91317fd3a723ba2 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24C9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24C1-04 |
| filingDate |
2009-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e092dfe643fe0a07e446caade6ba546c |
| publicationDate |
2011-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2011093080-A |
| titleOfInvention |
Sandblast processing method and apparatus for cutting line-shaped pattern on processed substrate |
| abstract |
[PROBLEMS] Conventionally, in pattern cutting processing by sandblasting, a method using a photosensitive dry film as a mask and a method of masking by printing a masking ink by screen printing are costly and time consuming. There is a demand for a method that can accurately perform line-shaped groove processing such as substrate dicing and solar cell groove processing by a simple masking method. A masking plate in which slit-like through grooves are formed in a direction in which abrasive is sprayed onto a processed substrate is sprayed at an angle of 30 degrees or less with respect to the processed substrate and the abrasive is sprayed. By moving the plate and the abrasive spray nozzle in the tilt direction of the abrasive spray nozzle, line-shaped grooves can be processed with high accuracy. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103659612-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102261577-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102715634-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107649839-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014046392-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9505102-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180134581-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101953972-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102211317-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210052098-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103659612-B |
| priorityDate |
2009-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |