http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011089163-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b0120933550ea729b9f3186c3772531b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| filingDate | 2009-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03d2a0f2834dd56f259d7af67145e8d5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85028752c80058edd3fb4ef50ac3eabd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc26ae9cd01928cdadc70f8a6242b5f3 |
| publicationDate | 2011-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011089163-A |
| titleOfInvention | Vaporizer, vaporization method and CVD apparatus |
| abstract | In a vaporizer that vaporizes a raw material solution and supplies it to a reaction chamber, a technique for preventing a solid raw material from adhering to a vaporizing chamber wall when the raw material solution is vaporized is provided by a very simple heater structure. An introduction portion for introducing a liquid or gas into a vaporization chamber is provided with a central axis coinciding with an upper wall of a vaporization chamber, and a raw material solution is sprayed from the tip portion into the vaporization chamber. The first introduction pipe 121 and a second introduction pipe 122 that are provided concentrically outside the first introduction pipe and introduce an inert gas into the vaporization chamber are used. Further, the cylindrical heater 13 provided on the outer periphery of the vaporizing chamber is provided such that the upper end 13a extends upward from the upper wall of the vaporizing chamber. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014017776-A1 |
| priorityDate | 2009-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.