http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011085812-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2009-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a988f3fec52dd71e838f0c20ad819dc8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 |
| publicationDate | 2011-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011085812-A |
| titleOfInvention | Resist composition and pattern forming method |
| abstract | An object of the present invention is to provide a resist composition exhibiting high resolution, good pattern collapse resistance, and good mask error factor (MEF). A resist composition comprising a resin having a repeating unit derived from a compound represented by formula (I) and a repeating unit derived from a compound represented by formula (II). [Wherein R 1 and R 3 are H, a halogen atom or an alkyl group optionally having a halogen atom; T is an alicyclic hydrocarbon group, and the group is a halogen atom, a hydroxyl group, an alkyl group, an alkoxy group; A group, an aryl group, and the like, and —CH 2 — contained in the group is replaced by at least one —SO 2 —, and —CO—, —O—, —S—, —SO 2 — or —N (R 2 ) — may be substituted; R 2 represents H or an alkyl group; X represents —CH 2 —, —O— or —S—. ] [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013083973-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013083972-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017201409-A |
| priorityDate | 2009-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 274.