| abstract |
There continues to be a need for the development of improved compositions for DLI of high viscosity or solid organometallic precursors with low vapor pressure. Formulations containing the following (a) and (b): (a) one or more ligands are β-diketonate, β-ketoiminate, β-diketoesterate, β-diiminate, alkyl, A metal-ligand complex selected from the group consisting of carbonyl, alkylcarbonyl, cyclopentadienyl, pyrrolyl, alkoxide, amidinate, imidazolyl, and mixtures thereof, wherein the metal is group 2 to group 16 of the periodic table At least one metal-ligand complex selected from elements of the group; and (b) R 1 R 2 NR 3 OR 4 NR 5 R 6 , R 1 OR 4 NR 5 R 6 , O (CH 2 CH 2 ) 2 NR 1 , R 1 R 2 NR 3 N (CH 2 CH 2 ) 2 O, R 1 R 2 NR 3 OR 4 N (CH 2 CH 2 ) 2 O, O (CH 2 CH 2 ) 2 NR 1 An amino ether selected from a structure consisting of OR 2 N (CH 2 CH 2 ) 2 O and a mixture thereof, wherein R 1-6 are C 1-10 linear alkyl, C 1-10 branched alkyl, C 1-10 cyclic alkyl, C 6 -C 10 aromatic, C 1-10 alkyl amine, C 1-10 alkyl aminoalkyl, C 1-10 ether, C 4 -C 10 cyclic ether, C 4 -C 10 cyclic An amino ether individually selected from the group consisting of amino ethers and mixtures thereof. [Selection figure] None |