http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011080116-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7a37d7a7385924dd55e29ac1e96d1492 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-00 |
| filingDate | 2009-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_82c3406fcc842ab8e502cd6cc7ea08de |
| publicationDate | 2011-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011080116-A |
| titleOfInvention | ITO sputtering target and manufacturing method thereof |
| abstract | 30 regions of 20 μm × 20 μm are arbitrarily selected from tissue images obtained by observing at a magnification of 1000 using a scanning electron microscope, and each region is selected with a wavelength dispersive electron beam microanalyzer. The mass composition (mass%) of In and Sn is analyzed, the Sn / (In + Sn) ratio is determined, and the average composition x, which is the average of 30 SnO 2 compositions obtained by conversion from this ratio, An ITO sputtering target characterized in that the standard deviation σ of each SnO 2 composition satisfies the relationship of 2 ≦ x / σ ≦ 6. The ITO sputtering target of the present invention has a high compressive strength, and is less likely to crack even when sputtering is performed with a high power applied, and arcing and nodule generation can be suppressed. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014021374-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115893989-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101583693-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150139623-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015125588-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5816394-B1 |
| priorityDate | 2009-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447762228 |
Total number of triples: 20.