http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011075348-A

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filingDate 2009-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2011-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2011075348-A
titleOfInvention Test piece manufacturing method
abstract PROBLEM TO BE SOLVED: To provide a method for producing a test piece with high measurement sensitivity and capable of performing analysis effectively. In a method of manufacturing a test piece having a nanostructure surface on which a large number of microcolumnar bodies are formed, a step of depositing a transparent metal oxide or metal fluoride on a substrate from an oblique direction, obtained by vapor deposition. A first step of forming a large number of anisotropic pillars on the substrate by reversing the deposition direction for each predetermined film thickness, and a noble metal having a thickness of 20 nm or more and 40 nm or less on the top of the formed pillars And a second step of vapor deposition. [Selection] Figure 1
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Total number of triples: 47.