abstract |
PROBLEM TO BE SOLVED: To provide a method for producing a test piece with high measurement sensitivity and capable of performing analysis effectively. In a method of manufacturing a test piece having a nanostructure surface on which a large number of microcolumnar bodies are formed, a step of depositing a transparent metal oxide or metal fluoride on a substrate from an oblique direction, obtained by vapor deposition. A first step of forming a large number of anisotropic pillars on the substrate by reversing the deposition direction for each predetermined film thickness, and a noble metal having a thickness of 20 nm or more and 40 nm or less on the top of the formed pillars And a second step of vapor deposition. [Selection] Figure 1 |