http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011070057-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6bfdf49224a405be1f7b653c56ebad94 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 |
| filingDate | 2009-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7bc82386b14853f52157e740541d67e4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b47790e96f343a16ffab0eeea3508a11 |
| publicationDate | 2011-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011070057-A |
| titleOfInvention | Resist stripper and stripping method using the same |
| abstract | 【Task】 Provided is a resist stripper that exhibits excellent resist stripping properties, suppresses corrosion of copper and molybdenum, and further suppresses galvanic corrosion between these different metals. [Solution] Resist stripping agent containing 2- (N, N-dimethyl-2-aminoethoxy) ethanol, urea and water exhibits excellent resist stripping properties, suppresses corrosion of copper and molybdenum, and further between copper and molybdenum Galvanic corrosion can be suppressed. 2- (N, N-dimethyl-2-aminoethoxy) ethanol is preferably 0.1% by weight to 80% by weight, and urea is preferably 0.1% by weight to 30% by weight. [Selection figure] None |
| priorityDate | 2009-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 55.