http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011068929-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_915269922949d81a90260e5cd5d2df40 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-28 |
| filingDate | 2009-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56119833f58917e4062b58c28c7386e2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e732b139f034ea982b7ab51956d4a664 |
| publicationDate | 2011-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011068929-A |
| titleOfInvention | Method of forming film by laser ablation, target for laser ablation used in the method, and method for manufacturing the target for laser ablation |
| abstract | To provide a film forming method by laser ablation capable of forming a film sufficiently efficiently while sufficiently suppressing the mixing of droplets. SOLUTION: A target 1 is irradiated with laser light L to generate scattered particles a, and the scattered particles a are attached to the surface of a base material 5 to form a film on the surface of the base material 5 to form a film by laser ablation. A method, The target 1 includes a support substrate and a particle layer made of particles of an inorganic material formed on the support substrate, the average particle diameter of the particles of the inorganic material is 5 nm to 50 μm, and the particle layer A film forming method by laser ablation, wherein the thickness is 1 to 200 μm. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111446358-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111446358-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017512639-A |
| priorityDate | 2009-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 44.