Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C229-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C229-56 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D295-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D207-16 |
filingDate |
2010-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7504b6464847008bffd1808536c8ecb0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_153d9ab45d90d19234e4e5282fb77563 |
publicationDate |
2011-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2011059672-A |
titleOfInvention |
Photoresist composition |
abstract |
A photoresist composition capable of forming a pattern having excellent exposure latitude is provided. When a compound represented by the formula (C1) is used in a resist composition, a wide exposure latitude can be achieved. [In the formula (C1), R c1 represents a group represented by the formula (1). R c3 and R c4 each independently represent a hydrogen atom or an aliphatic hydrocarbon group; R c5 represents a divalent organic group. R c2 represents a C 7-20 aralkyl group which may have a substituent. ]. [Selection figure] None |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012234155-A |
priorityDate |
2009-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |