| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C215-74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D233-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D213-30 |
| filingDate |
2009-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_811c9e6e856f6d34daba788e2d6e8199
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a20104ecee0ec4bcd8f7e4cf2aa6743
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5274201dd3cdbfb3b87410e86dbb2323
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2be8c1d8302d6fb84663820906c7f02 |
| publicationDate |
2011-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2011059277-A |
| titleOfInvention |
Compound and resist composition |
| abstract |
A resist composition capable of forming a fine resist pattern is provided. A resist composition comprising a compound and an acid generating agent represented by formula (C1) can form a fine resist pattern wherein (C1), m3 represents an integer of 4 to 10; R c1 Represents a hydroxy group or the like; n3 represents an integer of 1 to 4; and R c2 represents a group represented by the formula (2-1) or the formula (2-2). In formula (2-1) and formula (2-2), L c1 represents a divalent hydrocarbon group; L c2 represents a single bond or a divalent hydrocarbon group; R c3 and R c4 represent Represents a hydrogen atom or an aliphatic hydrocarbon group; R c5 represents a cyclic group containing a nitrogen atom as an atom constituting the ring. ]. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020106696-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7257142-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11474432-B2 |
| priorityDate |
2009-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |