| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2d825814c2847d297de844b4e7c60de4 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2933-0083 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D5-24 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G19-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G23-053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G25-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B13-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-44 |
| filingDate |
2010-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8d10fa95d8e31427f359fbf8097d124
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04968bb8906db1bc7dc8ae96a7e4216c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50f2d18d93ff4db33a11ebdd09ffcc4a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_971a36297dd2eae12481bf1bed9d6a6e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_392b4007b1b8f9e686cf6e7f658c889b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_744b186da10f3ca8527779adee56bffe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff6d46b83dc7dd71b7c1e45658979918
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf36e031585c073cce88b1c83dcabb55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1b879c6e19b5b42ce51276bba322fb5 |
| publicationDate |
2011-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2011051875-A |
| titleOfInvention |
Method for forming metal oxide thin film pattern using nanoimprint and method for manufacturing LED element |
| abstract |
Disclosed is a method for forming a metal oxide thin film pattern in which a photosensitive metal-organic precursor solution is applied to a substrate without using a photosensitive prepolymer resin, and is directly patterned by a nanoimprint method. A directly patterned metal oxide thin film pattern and a method for manufacturing an LED element including a photonic crystal layer by the formation method are provided. A photosensitive metal organic precursor solution is formed by coating a substrate with a photosensitive metal organic precursor solution to form a photosensitive metal organic precursor coating layer, and a mold patterned to have a concavo-convex structure. Pressurizing the coating layer; forming a cured metal oxide thin film pattern by irradiating the pressurized photosensitive metal organic precursor coating layer with ultraviolet light; and subjecting the patterned mold to the metal oxidation. A method for forming a metal oxide thin film pattern using nanoimprinting, including a step of removing from the thin film pattern. [Selection] Figure 2 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110651226-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110651226-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8486753-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180066307-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8597873-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7148535-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011146661-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101885174-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015111639-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020515060-A |
| priorityDate |
2009-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |