http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011049263-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_962adbf7d50e742218f3d536a63df612 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301 |
| filingDate | 2009-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da5e0132e9c1b7c3a46862f19436a059 |
| publicationDate | 2011-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011049263-A |
| titleOfInvention | Light irradiation apparatus and light irradiation method |
| abstract | An object of the present invention is to provide a light irradiation apparatus and a light irradiation method that do not reflect light such as ultraviolet rays that have passed through an adherend having an adhesive sheet attached to one surface to the other surface of the adherend. . A light irradiation apparatus (10) for irradiating ultraviolet light onto an adhesive sheet (S) having an ultraviolet curable adhesive (AD) layer affixed to one surface of a semiconductor wafer (W), on one surface side of the semiconductor wafer (W). The ultraviolet lamp 12 is disposed, and a cover member 13 is disposed on the other surface side of the semiconductor wafer W and blocks leakage of ultraviolet light that has passed through the side of the semiconductor wafer W. A light absorbing means T containing an ultraviolet absorber is provided on the inner surface side of the cover material 13, and the light absorbing means T absorbs ultraviolet rays and prevents reflection to the other surface side of the semiconductor wafer W. . [Selection] Figure 1 |
| priorityDate | 2009-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 16.