| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_de498babb0c04a00ceb653738877b147 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-359
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-3577
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-01 |
| filingDate |
2009-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0701845e5186301c029508797bd4590
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c3f02a9d36ee4e46c74119c4ab0ef34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93d726feb1caef345c34d29ecf7b4a39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d5970396700a1ab3d852e80153ae91e |
| publicationDate |
2011-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2011047701-A |
| titleOfInvention |
Method for measuring components of thin film material composition |
| abstract |
The present invention relates to a composition comprising two or more components used for forming a thin film of a metal-containing material, and an effective thin film material composition comprising at least one metal compound and other compounds as active ingredients. Provided is a method for measuring some or all of the components. A component measurement method using spectral absorption by near infrared spectroscopy is used. [Selection] Figure 2 |
| priorityDate |
2009-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |