| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_37f4922dfb7777b019e504b885211b8e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99505f5f312672820e9f78c254c00a4d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2015-0846 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-956
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-211 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-47 |
| filingDate |
2010-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1713c8e291406e8863cf426ac5750c00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03165c68bf0053ed4502864164bd769d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8cfff556f8c18b4304e1dd8f4f3f42fa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b84ab4a5f985833d50cbd4a3211b842
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51e12c53493ae4d5100c810aaf062390 |
| publicationDate |
2011-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2011039044-A |
| titleOfInvention |
Methods for optical characterization |
| abstract |
A method for nondestructive optical property evaluation is provided. Method 100 includes 101 steps of determining geometric parameters of one or more geometric patterns and an experimental optical response 105 of the diffractive structure located within a chamber at a predetermined pressure. A scatterometric acquisition step 102, wherein the adsorbable gaseous substance in at least one part of the open pores of the pattern of the diffractive structure due to the presence of the adsorbable gaseous substance in the chamber; A stage 102 in which condensation of Determining 106 a theoretical optical response 107 of the diffractive structure by adjusting an optical refractive index of the material in each region of the one or more geometric patterns; Possible gaseous substances are condensed and the difference between the experimental optical response 105 and the theoretical response 107 falls below a predetermined threshold. [Selection] Figure 4 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109313116-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109313116-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102544666-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180132944-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102221069-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018532123-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180122439-A |
| priorityDate |
2009-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |