| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d610873487d2bc9668c04d7c2ec8e6c |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate |
2009-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c4df92cbb54e4250760240c786951fe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_afb1fd84da3015b1a66c0b35083f3f24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e27968ef3982e4cabecf19eec719b863 |
| publicationDate |
2011-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2011035218-A |
| titleOfInvention |
Method for detecting reaction products |
| abstract |
The present invention provides a detection method of a reaction product that can detect the presence or absence of a residual reaction product (invisible film) on a reactor part after cleaning by a simple method. After cleaning a reaction product adhering to a reactor part 11 after vapor deposition of a thin film on a substrate, the reactor part 11 is irradiated with light of a specific wavelength, for example, a black light 16. Then, the remaining state of the reaction product on the reaction furnace part 11 is detected by detecting the light emission state of the reaction product remaining on the reaction furnace part 11. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016158895-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10160062-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018037571-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2013047506-A1 |
| priorityDate |
2009-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |