http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011029361-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d79a3714d75520adeea100b7ed428a77 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-46 |
| filingDate | 2009-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1aee0a450f8f15e2de0d647a39c37e14 |
| publicationDate | 2011-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011029361-A |
| titleOfInvention | Vapor growth apparatus and vapor growth method |
| abstract | A vapor phase growth apparatus and method for uniformly heating a large-diameter semiconductor wafer are provided. A vapor phase growth apparatus includes a reaction chamber and a first lamp group to a fourth lamp group. In the reaction chamber 11, a susceptor 13 on which the semiconductor wafer W is placed is disposed. The first lamp group 1 is disposed above the reaction chamber 11 and heats the outer region of the semiconductor wafer W. The second lamp 2 group is disposed on the upper part of the reaction chamber 11 to heat the inner region of the semiconductor wafer W. The third lamp 3 group is disposed below the reaction chamber 11 to heat the outer region of the semiconductor wafer W. The fourth lamp 4 group is disposed below the reaction chamber 11 and heats the inner region of the semiconductor wafer W. The first lamp 1 group and the third lamp 3 group are arranged in an annular shape so as to go to the center of the susceptor 13, and the second lamp 4 group and the fourth lamp 4 group are set so as to go to the center of the susceptor 13. The first lamp 1 group and the third lamp 3 group are arranged in an annular shape inside. [Selection] Figure 1 |
| priorityDate | 2009-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426098976 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327210 |
Total number of triples: 13.