Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c75a57c3359f361db66b025dad577ea1 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-64 |
filingDate |
2009-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca9fc19ae92a801dd68ac8775b19efee http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91fcabef98cec080ba0a3b7297f7c60c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b3769c40f3932dc274380c40f3e964a6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc3e2989ee9ea5f5806d282e3abdae5e |
publicationDate |
2011-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2011029043-A |
titleOfInvention |
Mass spectrometer and mass spectrometry method |
abstract |
PROBLEM TO BE SOLVED: To provide a mass analyzer capable of improving sample damage without lowering secondary ion yield. An ion source for generating a primary ion beam for generating secondary particles by irradiating a sample in a mass analyzer for analyzing secondary ions and neutral secondary particles ionized later. And an analysis unit for mass spectrometry of secondary particles, equipped with a function that can control the kinetic energy per atom constituting the primary ion in a region of 20 eV or less. As the primary ions, gas cluster ions in which gas atoms are aggregated by van der Waals force may be used. [Selection] Figure 1 |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8772712-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9147568-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014010443-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2873087-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018054603-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104471670-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101502389-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8963078-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9627177-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8963081-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2513736-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2513736-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013242302-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014032954-A |
priorityDate |
2009-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |