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publicationDate 2011-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2011026187-A
titleOfInvention Ozone supply method and apparatus
abstract An ozone supply device capable of reducing an oxygen concentration while maintaining an ozone content in an ozone-containing gas. SOLUTION: A mixing means 1 for dissolving an oxygen-ozone mixed gas in a fluorine-based solvent to produce a mixed solution, an undissolved gas removing means 2 for removing undissolved gas from the mixed solution, and an undissolved gas The ozone supply device 11 is used, which includes a deaeration means 3 for taking out the ozone-containing gas dissolved in the mixed solution after the removal from the mixed solution. [Selection] Figure 1
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