http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011017034-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1337 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-13 |
| filingDate | 2009-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21304090c699ff105b9969c223642d95 |
| publicationDate | 2011-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011017034-A |
| titleOfInvention | Sputtering apparatus and liquid crystal device manufacturing apparatus |
| abstract | In a reactive sputtering apparatus in which sputtering particles are supplied from an oblique direction of a substrate, a sputtering apparatus capable of ensuring a good film formation rate is provided. A film forming chamber 2 having a substrate holder 6 for holding a substrate W and capable of transporting the substrate holder 6 and a sputtering chamber 3 communicating with the film forming chamber 2 and having a target 10 disposed therein are provided. A sputtering apparatus for forming a reaction product film on a substrate W by a reaction between sputtering particles discharged from the sputtering chamber 3 to the film formation chamber 2 and a reaction gas. A box 20 having a hole larger than the outer periphery of the target 10 is provided in the sputtering chamber 3, and the surface of the target 10 faces the inner surface of the box 20 through the first opening 21 of the box 20, A second opening 22 through which the sputtered particles pass is provided in a part of the surface of the box 20 facing the target 10. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104131257-A |
| priorityDate | 2009-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.