http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011011516-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b9a255559e1d94f20510a17a673b1078 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-055 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-045 |
| filingDate | 2009-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_155c41f99235ffa62c078d158ccf41f5 |
| publicationDate | 2011-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011011516-A |
| titleOfInvention | Piezoelectric actuator, droplet discharge head, and droplet discharge device |
| abstract | A piezoelectric actuator provided with a heat-resistant adhesive layer with improved heat resistance while ensuring adhesion between a piezoelectric element and a diaphragm as a base structure of a lower electrode layer, and a droplet discharge head provided with the piezoelectric actuator A droplet discharge device is provided. A vibration plate formed on a Si substrate and at least one metal element selected from Ti, Ta, Zr, V, Nb, and Mo, oxygen element, carbon, or carbon provided on the vibration plate 40 A heat-resistant adhesive layer 11 composed of an element of nitrogen, and a piezoelectric element 2 in which a lower electrode film 50, a piezoelectric film 60, and an upper electrode film 70 are laminated in this order on the heat-resistant adhesive layer 11. Prepare. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10700258-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017038082-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3511992-A1 |
| priorityDate | 2009-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.