| abstract |
PROBLEM TO BE SOLVED: To provide a polishing liquid material in which a protective film forming agent having low solubility in water is dissolved at a high concentration without precipitating, and when performing actual polishing, a diluent or the like is added to the metal Provided is a metal-polishing liquid material from which a metal-polishing liquid can be easily prepared. SOLUTION: An oxidizing agent, a metal oxide solubilizer, a protective film forming agent, a solubilizing agent for the protective film forming agent and a metal-containing polishing liquid, and a metal oxide for preparing the metal polishing liquid A metal-polishing liquid material comprising a dissolving agent, a protective film forming agent, and a dissolution aid for the protective film forming agent. [Selection figure] None |