abstract |
An acid-eliminating ester monomer having a spiro ring structure represented by the general formula (1). (Z is a monovalent group having a polymerizable double bond, X is a divalent group that forms a substituted or unsubstituted cyclopentane ring, cyclohexane ring or norbornane ring with the carbon atom to which it is bonded, and R 2 is hydrogen. atom, or .R 3, R 4 representing a monovalent hydrocarbon radical represents a hydrogen atom, or a monovalent hydrocarbon group, or, R 3 and R 4 are substituted or together with the carbon atom to which they are attached (It represents an unsubstituted cyclopentane ring or a divalent group forming a cyclohexane ring. N represents 1 or 2.) [Effect] The acid-eliminating ester-type monomer having a spiro ring structure of the present invention is useful as a raw material for functional materials, etc., has extremely high reactivity in acid elimination reaction, and has high resolution. It is very useful as a monomer for producing a base resin of a good radiation sensitive resist material. [Selection figure] None |