| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate |
2008-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2010-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2010541204-A |
| titleOfInvention |
Polishing composition and method of using abrasive particles treated with aminosilane |
| abstract |
The method of the present invention involves chemically and mechanically polishing a substrate with the polishing composition of the present invention comprising abrasive particles treated with a liquid carrier and a compound. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020164658-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7274844-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019070113-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019070112-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2019181399-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7253924-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017524770-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017524767-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017525797-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017525793-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017527104-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017514170-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017517900-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019527468-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019181399-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7300030-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7274845-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11267988-B2 |
| priorityDate |
2007-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |