http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010520451-A

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filingDate 2008-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2010-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2010520451-A
titleOfInvention Method and apparatus for test gas leak detection
abstract A method for forming a composite film with low temperature dependence is provided. A leak detector includes a leak detector inlet for receiving a test gas, a vacuum pump connected to the leak detector inlet, and a test gas sensing connected to the leak detector inlet via a passage. A membrane that is permeable to a unit and to the test gas and is disposed in the passage between the leak detector inlet and the test gas sensing unit, wherein T 0 is a design temperature for the test gas. and a film having a permeability that varies less than 5 percent for the temperature range of T 0 -20K~T 0 + 20K to some time. In addition, a method is provided for forming a composite membrane comprising a semipermeable membrane and a porous membrane. In addition, a leak reference including a composite membrane is provided. [Selection] Figure 3
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016520196-A
priorityDate 2007-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 23.