http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010501045-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B21D26-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3414 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3407 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B21D22-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3435 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K20-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K20-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K20-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B21K25-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate | 2007-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2010-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010501045-A |
| titleOfInvention | Novel manufacturing design and processing method and processing apparatus for PVD target |
| abstract | A method for fabricating a PVD sputtering target with elongated sidewalls, comprising: a) joining a surface material to a core material to produce a rough shape; and b) forming a rough shape. , In some embodiments, c) forming a target using at least one machining step. Furthermore, a method for manufacturing a PVD sputtering target having an extended side wall, comprising the steps of: a) joining a surface material to a core material to produce a rough profile and simultaneously forming the rough profile; , In some embodiments b) forming a target using at least one machining step. PVD sputtering targets and associated equipment formed using these methods are also described herein. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101827472-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5914786-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016006155-A1 |
| priorityDate | 2006-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 124.