http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010500607-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-952 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-09 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G63-12 |
| filingDate | 2007-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2010-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010500607-A |
| titleOfInvention | Anti-reflective coating composition for photoresist |
| abstract | The present invention is an antireflective coating composition for a photoresist layer comprising a polymer, a crosslinking agent and an acid generator, wherein the polymer has the following structure 1 [Chemical 1] [Wherein A is a non-aromatic linkage; R ′ and R ″ are independently selected from hydrogen, Z and W—OH, where Z is a (C 1 -C 20 ) hydrocarbyl moiety and W is (C 1 -C 20 ) hydrocarbyl. And Y ′ is independently a (C 1 -C 20 ) hydrocarbyl linkage] It is related with the said anti-reflective film composition containing the at least 1 type of unit represented by these. The invention also relates to a method for imaging the antireflective coating composition. |
| priorityDate | 2006-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 220.