http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010287906-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1345 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-092 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8238 |
| filingDate | 2010-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f74327831996456f176963d7d42a0038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ee163e4f194aec3ae8a4c5212afc4ad |
| publicationDate | 2010-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010287906-A |
| titleOfInvention | Semiconductor device |
| abstract | When a channel doping method is used to control a threshold voltage, an impurity is introduced into an active layer, so that inevitably a bulk crystal defect caused by the impurity or an interface position between a semiconductor layer and an insulating layer is inevitably caused. It will cause it. As a result, TFT characteristics, particularly field effect mobility, are deteriorated. A crystalline semiconductor film having a product of a stress and a film thickness of a first insulating layer provided on an electrode formed on a substrate and a tensile stress provided on the first insulating layer. The threshold voltage is controlled by setting the product of the stress and film thickness of the active layer and the product of the stress and film thickness of the second insulating layer provided on the active layer to an appropriate magnitude. [Selection] Figure 4 |
| priorityDate | 2010-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.