http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010285327-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B11-00 |
| filingDate | 2009-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1bb69d6fb8cbe3cebe46b3a7dcce5e7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04cdfadce387fe899c29d33e742049d0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fec4ac2775be72932822a088dfe85921 |
| publicationDate | 2010-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010285327-A |
| titleOfInvention | Fluoride heat treatment method, fluoride single crystal production method, and fluoride single crystal |
| abstract | Fluoride single crystal having sufficiently high transmittance in the ultraviolet / vacuum ultraviolet (UV / VUV) region and excellent in laser resistance and UV / VUV resistance, a fluoride heat treatment method and a fluoride A method for producing a compound single crystal is provided. An accommodation step of containing fluoride 5 as an object to be processed together with a scavenger having a deoxygenating function in an airtight heating furnace 100, and exhausting the airtight from the airtight heating furnace 100 When the temperature of the scavenger is lower than the melting point of the scavenger by 20 ° C. to 50 ° C., the temperature rising start step for starting the temperature rise of the scavenger after the pressure in the furnace 100 is reduced to 1 × 10 −1 Pa or less. An exhaust stop step for stopping the exhaust from the inside of the heating furnace 100, and an exhaust restart for restarting the exhaust from the inside of the heating furnace 100 when the scavenger temperature is higher by 20 ° C. to 50 ° C. than the melting point of the scavenger. Steps. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114635188-A |
| priorityDate | 2009-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.