http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010283381-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60e21de07fa18fc54e2150daffc14654 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2010-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_497f09dd0eb4105369bdad6ecb055c87 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8a438f1f4831ddbd24fedaafe8640c2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef2e06bea453efed6768a8835e51c99a |
| publicationDate | 2010-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010283381-A |
| titleOfInvention | Method for manufacturing heterostructure |
| abstract | A method for manufacturing a heterostructure capable of forming a heterostructure in a micropore is provided. SOLUTION: Nano-sized metal fine particles are formed on a substrate 1, and then a first substance is selectively grown on the metal fine particles by a VLS growth method to form a columnar structure that is a nanowire. Then, after the substrate 1 is filled with the second material 4 below the height of the columnar structure, the first material and the second material 4 are selectively etched using a difference in reactivity between the first material and the second material 4. The columnar structure, which is one material, is removed to form the micropore 4a, and the heterostructure crystal (7, 8, 9) is formed at a temperature higher than the temperature at which the first material is grown in the micropore 4a. ) Grow. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9257552-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013129548-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8927373-B2 |
| priorityDate | 2010-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.