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filingDate 2010-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2010-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2010283350-A
titleOfInvention Rare earth enhanced high electron mobility transistor and manufacturing method thereof
abstract A HEMT is provided that prevents escape of charge carriers from a semiconductor active region and exhibits more effective confinement of charge carriers. A high electron mobility transistor (HEMT) 200A having a first group III-V intrinsic layer 209a doped with a rare earth additive, the second group III formed on the intrinsic layer. A Group V-V intrinsic layer 210a and a Group III-V semiconductor layer 220 formed on the second Group III-V intrinsic layer are also provided. In the HEMT manufacturing method, a first III-V intrinsic layer 209a is formed, and a rare earth additive is doped into the first III-V intrinsic layer to form an insulating layer. Further, a second group III-V intrinsic layer 210a is formed on the insulating layer, and a group III-V semiconductor layer 220 is formed on the second group III-V intrinsic layer. A two-dimensional electron gas (2DEG) 212 is formed at the heterojunction interface between the III-V semiconductor layer and the second III-V intrinsic layer. [Selection] Figure 2A
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