http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010278470-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5c6a9fd6219b32cd3893a49979951bf4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6506300a23c7893d30a5e4208001b645 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate | 2010-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03563daf5de7a9c0eadcb026879453c8 |
| publicationDate | 2010-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010278470-A |
| titleOfInvention | Group III nitride semiconductor growth substrate, group III nitride semiconductor epitaxial substrate, group III nitride semiconductor device, group III nitride semiconductor free-standing substrate, and methods of manufacturing the same |
| abstract | A group III nitride semiconductor epitaxial substrate having good crystallinity not only in AlGaN, GaN, and GaInN having a growth temperature of 1050 ° C. or lower, but also in Al x Ga 1-x N having a high Al composition and a high growth temperature, group III Provided are a nitride semiconductor device, a group III nitride semiconductor free-standing substrate, a group III nitride semiconductor growth substrate for manufacturing them, and a method for efficiently manufacturing them. A crystal growth substrate comprising at least a group III nitride semiconductor containing Al and a scandium nitride film formed on the surface portion. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111785794-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111785794-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107452861-A |
| priorityDate | 2009-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.