http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010278461-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f4a8faea375370b67c9d71e67db32bcd |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-20 |
| filingDate | 2010-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38eaa86630f85fa3d10571c45d36c02e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18579ca2b426d6edd7661c3c2f3c3db4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3cb6fb30a831b0140af582b1aa66790e |
| publicationDate | 2010-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010278461-A |
| titleOfInvention | Wafer heating device |
| abstract | In a wafer heating apparatus for supporting a wafer on a heat equalizing plate, if the mounting surface of the heat equalizing plate becomes concave, a gap between the heat equalizing plate and the wafer increases near the center. When the temperature setting is changed or when the wafer is replaced, the heating of the central part is delayed at the time of temperature rise transient, resulting in a problem that the temperature distribution in the wafer surface becomes large. A power feeding section having one main surface of a soaking plate made of ceramics as a wafer mounting surface, a heating resistor on the other main surface or inside, and electrically connected to the heating resistor. In the other main surface, the mounting surface of the soaking plate is made convex. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110251984-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106571322-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110251984-B |
| priorityDate | 2000-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.