| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2009-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd0220ce37934efb7eb2a8d8dd8df057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_871b126e5b0794762db895b73cf1ada6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d4799cab242ad724265eab89261740a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5251ce2b9b04c24a890936e8ba742a1f |
| publicationDate |
2010-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2010276624-A |
| titleOfInvention |
Radiation sensitive resin composition |
| abstract |
A radiation-sensitive resin composition having a wide depth of focus and excellent pattern peeling resistance is provided. (A) At least a repeating unit represented by the following general formula (1) and a repeating unit represented by the following general formula (2), and represented by the following general formula (2) in all repeating units. The radiation sensitive resin composition containing the polymer component whose ratio of the repeating unit is 1 mol%-10 mol%, and (B) a radiation sensitive acid generator. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10126650-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012141613-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013256658-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015148693-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017044875-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10571805-B2 |
| priorityDate |
2009-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |