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filingDate 2010-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf108caae95f9c814a63a626fd32ced5
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publicationDate 2010-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2010262306-A
titleOfInvention Immersion medium holding mechanism, immersion objective lens and manufacturing method thereof
abstract When observing and measuring a sample, the immersion medium supplied to the tip of the objective lens may be spilled from the tip of the objective lens even when the amount of movement for the measurement is large or for a long time. Provided are an immersion objective lens, an immersion medium holding mechanism, and a manufacturing method thereof. An immersion objective lens is formed of a tip portion, a lens ring portion, and a lens outer frame, and the lens ring portion is composed of the entire inclined surface from the lens at the tip portion to the lens outer frame 10, and the immersion objective lens. In the region including the front end portion of the lens and the lens ring portion, the immersion medium is held which is a region surface-treated with the first material for holding the immersion medium in a ring shape so as to surround the front end portion of the lens. The affinity of the first ring-shaped member (α portion) to the immersion medium is lower than the affinity of the region connected to the inside of the surface-treated region to the immersion medium. [Selection] Figure 8
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Total number of triples: 26.