| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C69-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C69-013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2010-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5274201dd3cdbfb3b87410e86dbb2323
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f9496034d4403d25d488eaf2f4029c4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 |
| publicationDate |
2010-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2010256876-A |
| titleOfInvention |
Chemically amplified photoresist composition |
| abstract |
An object of the present invention is to provide a chemically amplified photoresist composition or the like capable of forming a pattern having an excellent shape, line edge roughness, and focus margin. A chemically amplified photoresist composition containing an acid generator and a resin, wherein the resin is derived from a monomer that generates a carboxyl group and a hydroxy group by the action of an acid and has no lactone ring. A chemically amplified photoresist composition which is a resin containing a structural unit (b1-3) and a pattern forming method using the chemically amplified photoresist composition. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012295201-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016206459-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013100475-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8741541-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011074061-A |
| priorityDate |
2009-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |