http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010256370-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_217f357cdf25f5b68f965728040b8ef0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L35-32 |
| filingDate | 2010-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ad7915c12ffef14c5ff8df12cce31e5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46ac5c41402d8eb53d37dba5ed48467c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f0eef6174addfe2d02b7ddb5ae39934 |
| publicationDate | 2010-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010256370-A |
| titleOfInvention | Infrared sensor |
| abstract | An infrared sensor capable of preventing warpage of a thin film structure portion while reducing the thickness of the infrared absorption portion is provided. SOLUTION: A silicon substrate 1a and a thermal infrared detector 3 provided with a thermocouple-type temperature sensing portion 30 and formed on one surface side of the silicon substrate 1a are provided. A cavity 11 is formed in a portion corresponding to a part of the infrared detection unit 3. The thermal infrared detector 3 includes a thin film structure 3a that is spatially separated from the silicon substrate 1a by a cavity 11, and the thin film structure 3a is an infrared absorber 33 formed on one surface side of the silicon substrate 1a. Is formed on the surface opposite to the silicon substrate 1 a side, and when the cavity 11 is formed in the silicon substrate 1 a by anisotropic etching through the plurality of slits 13, Compensation polysilicon layers 39a and 39b are formed on the surface of the infrared absorbing portion 33 at a portion where anisotropic etching is difficult to start. [Selection] Figure 1 |
| priorityDate | 2010-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.