http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010250263-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-28 |
| filingDate | 2009-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e2e48eef761d322d9c1e7a10a50720c7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7b8b3d1d30054a260d0fa8836823486 |
| publicationDate | 2010-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010250263-A |
| titleOfInvention | Resist pattern forming method and resist pattern insolubilizing resin composition used therefor |
| abstract | A resist pattern forming method capable of easily and efficiently forming a resist pattern with finer and controlled line width variation while reducing the occurrence of damage. A resist pattern insolubilized resin composition containing a polymer containing a repeating unit represented by the following general formula (1) (R 1 is a hydrogen atom, R 2 is a methylene group, etc.) and a solvent. A step (1) of forming an insolubilized resist pattern by using, a step (2) of selectively forming a resist layer on the substrate on which the insolubilized resist pattern is formed, and a step of forming a second resist pattern. (3) and a resist pattern forming method. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102115817-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014152192-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014028904-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016110051-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140145963-A |
| priorityDate | 2009-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 686.